ALL-METAL DIGITAL MASS FLOW CONTROLLER DF-550C kofloc Vietnam

ALL-METAL DIGITAL MASS FLOW CONTROLLER DF-550C kofloc Vietnam, ALL-METAL DIGITAL MASS FLOW CONTROLLER DF-550C kofloc Viet nam. ALL-METAL DIGITAL MASS FLOW CONTROLLER DF-550C kofloc

KOFLOC Vietnam, KOFLOC Viet nam, KOFLOC

All-Metal Digital Mass Flow Controller DF-550C SERIES

DF-550C is now released as an all-metal model of the
high-performance digital mass flow controller DF-250C
Series.
The metal sealed structure enables controlling the measurement

Sensor type		Thermal sensor
Valve type		Normally closed proportional solenoid valve
Applicable gases*1		N2, Air, H2, He, Ar, O2, CO2, etc. Gases not specifically mentioned here are subject to calibration for N2 equivalent.)
Flow range*2		10 SCCM to 10 SLM
Control range		2 to 100% (F.S.)
Response*3		Total flow rate control range ≤ 1 sec (within ±2% F.S.)
Accuracy*4		±1.0%F.S.
Repeatability		±0.25%F.S.
Operating differential pressure*5		50 to 350 kPa (100 to 350 kPa for F.S. 10 SLM)
Inlet maximum pressure		500kPa（G）
Proof pressure		980kPa（G）
External leak rate		≤ 1.0 x 10-11 Pa·m3/sec (He)
Temperature	Working temp.	5 to 50℃
	Accuracy guaranteed temp.	15 to 35℃
	Allowable storage temp.	-10 to 60℃
Allowable operating humidity		10 to 90% RH (without dew condensation)
Materials of gas contact part		SUS316L, PTFE, and magnetic stainless steel
Electrical connection		D-sub 9-pin, KFC standard (SEMI standard compliant), RJ-45 modular jacks (two)
Flow rate setting signal		0 to 5 V DC (input impedance approx. 1 MΩ)
Flow rate output signal		0 to 5 V DC (load resistance 10 KΩ)
Digital communication		Address setting with RS485 rotary switch: up to 99 devices (9600 bps)
Required power supply (DC)		+15 V DC (±5%), 150 mA; -15 V DC (±5%), 150 mA
Joint		1/4 VCR or equivalent
Mounting posture		Horizontal installation recommended.
Weight		Approx. 1100 g

of corrosive gases such as semiconductor process
gases.

 

Features

・Response improved to 1 sec or faster in all flow rate　ranges thanks to a new solenoid
・The stainless steel seal supports high-reactive gases.
・Lineup ranging from 10 SCCM to 10 SLM
・Two communication ports enabling daisy chaining
・RS-485 communication function installed as standard
・RoHS CE standard compliant

Standard Specifications