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MASS FLOW METERS & CONTROLLERS FOR GAS

Xuất sứ: Holland

Nhà cung cấp: Pitesco

Hãng sản xuất: Bronkhorst

Liên hệ tư vấn

Mr. Trí

tri@pitesco.com

0912 300 549

EL-FLOW SELECT F-110C

EL-FLOW PRESTIGE FG-111B

EL-FLOW PRESTIGE FG-111B

Gas Mass Flow Meters for lowest flow rates

Bronkhorst® model F-110C Mass Flow Meters (MFMs) are suited for precise measurement of flow ranges between 0,014…0,7 mln/min and 0,6…9 mln/min at operating pressures between vacuum and 100 bar. The MFM consists of a thermal mass flow sensor and a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for optional mass flow control by means of a separately mounted control valve.

EL-FLOW® Select series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide DeviceNet™, PROFIBUS DP, Modbus, EtherCAT®, PROFINET or FLOW-BUS protocols. The EL-FLOW® Select design features optional Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.

Measurement / control system

Accuracy (incl. linearity)
(based on actual calibration)

standard: ±0,5% Rd plus ±0,1%FS
(±0,8% Rd plus ±0,2% FS for ranges 3...5 mln/min;
±1% Rd plus ±1% FS for ranges < 3 mln/min)

Repeatability

< 0,2% Rd

Turndown

1 : 150; in analog mode 1 : 50

Multi Gas/Multi Range gases

embedded gas data for Air, N2, Ar, H2, O2, CO, CO2, He, CH4, SiH4, NH3, C2H2, C2H4, C2H6, Kr, C3H6 #2 (propene), C2F6, C3H8, NF3, N2O, H2S, Cl2, SF6, NO, Xe, plus any mixture of maximum 5 of these gases.

Operating temperature

-10…70°C

Temperature sensitivity

zero: < 0,02% FS/°C; span: < 0,025% Rd/°C

Pressure sensitivity

< 0,15% Rd/bar typical N2;
< 0,02% Rd/bar N2 (incl. pressure correction option)

Leak integrity, outboard

tested < 2 x 10-9 mbar l/s He

Attitude sensitivity

max. error at 90º off horizontal 0,07% FS at 1 bar, typical N2

Warm-up time

30 min. for optimum accuracy

 

Mechanical parts

Material (wetted parts)

stainless steel 316L or comparable, degreased for use on oxygen (O2)

Pressure rating

100 bar (g)

Process connections

compression type or face seal couplings

Seals

standard: Viton®
options: EPDM, Kalrez® (FFKM), FDA and USP Class VI approved compounds

 

Electrical properties

Power supply

+15…24 Vdc

Max. power consumption Meter

Supply
15 V
24 V

at voltage I/O
69 mA
45 mA

at current I/O
92 mA
63 mA

Max. power consumption Controller (controllers based on normally closed valve, pin 5 not used)

Supply
15 V
24 V

at voltage I/O
202 mA
128 mA

at current I/O
225 mA
146 mA

If applicable: PROFIBUS DP

add 53 mA (15 V supply) or 30 mA (24 V supply)

PROFINET

add 76 mA (15 V supply) or 48 mA (24 V supply)

EtherCAT®

add 66 mA (15 V supply) or 41 mA (24 V supply)

DeviceNet™

add 48 mA (24 V supply)

Analog output/command

0...5 (10) Vdc or 0 (4)…20 mA (sourcing output)

Digital communication

standard: RS232;
options: PROFIBUS DP, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU or ASCII, FLOW-BUS

 

Electrical connection

Analog/RS232

9-pin D-connector (male);

PROFIBUS DP

bus: 9-pin D-connector (female);
power: 9-pin D-connector (male);

Devicenet™

5-pin M12-connector (male);

EtherCAT®/PROFINET

2 x RJ45 modular jack (in/out)

Modbus/FLOW-BUS

RJ45 modular jack

CE

EMC 2014/30/EU, RoHS 2011/65/EU,

IEC 61010-1

2010

Ingress protection (housing)

IP40